Automatic wafer prober having a probe scrub routine

Details Automatic wafer prober having a probe scrub routine Automatic wafer prober having a probe scrub routine

1981-07-30

1986-05-20

Karlsen, Ernest F.

Electricity: measuring and testing

Measuring, testing, or sensing electricity, per se

With rotor

15 1, 51 5R, 51281R, 134 6, 324158P, G01R 3102, G01R 106, B24B 700, B08B 700

Patent

active

045904227

ABSTRACT:
In an automatic wafer prober, the prober steps through a certain predetermined sequence of die on the wafer. After a certain predetermined number of die have been probed, the prober automatically interrupts the probing sequence and steps the prober off of the wafer onto an abrasive element for scrubbing clean the probe tips. Thereafter, the prober returns to its predetermined probing sequence. The abrasive element is preferably fixidly secured to the wafer chuck. A flat of the abrasive element serves as an alignment flat for registration with a flat of the wafer.

REFERENCES:
patent: 3996517 (1976-12-01), Fergason et al.

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