Automatic wafer orienting apparatus

Details Automatic wafer orienting apparatus Automatic wafer orienting apparatus

1981-04-21

1983-10-04

Paperner, Leslie J.

Material or article handling

Article reorienting device

Article frictionally engaged and rotated by relatively...

198394, 414754, 414787, B65G 4724

Patent

active

044076274

ABSTRACT:
An automatic wafer orienting apparatus comprising a first orienting device for driving and rotating a wafer thereby orienting the wafer while utilizing a peripheral edge and an orientation cut thereof as the guide, a device for disengaging the thus oriented wafer from the first wafer orienting device, and a second wafer orienting device for re-orienting the wafer by pressing a lateral edge and an orientation cut thereof against orienting members provided on a wafer chuck.

REFERENCES:
patent: 3297134 (1967-01-01), Pastuszak
patent: 3820647 (1974-06-01), Waugh et al.
patent: 3865254 (1975-02-01), Johannsmeier
patent: 3982627 (1976-09-01), Isohata
patent: 4179110 (1979-12-01), Kosugi et al.
Wafer Centering Fixture; IBM Technical Disclosure Bulletin, vol. 14, No. 4; Sep. 1971.
Wafer Angular Alignment Detection and Positioning System; IBM Technical Disclosure Bulletin, vol. 14, No. 11; Apr. 1972.

Affiliated with

Also associated with

Rating

Automatic wafer orienting apparatus does not yet have a rating. At this time, there are no reviews or comments for this patent.

If you have personal experience with Automatic wafer orienting apparatus, we encourage you to share that experience with our LandOfFree.com community. Your opinion is very important and Automatic wafer orienting apparatus will most certainly appreciate the feedback.

Rate now

Comments { 0 }

Profile ID: LFUS-PAI-O-971663