Automatic wafer feeding and pre-alignment apparatus and method

Details Automatic wafer feeding and pre-alignment apparatus and method Automatic wafer feeding and pre-alignment apparatus and method

1973-10-09

1976-01-06

Blunk, Evon C.

Cutlery

198257, 221173, 355 73, B65G 4724

Patent

active

039306844

ABSTRACT:
Improved apparatus and method for automatically withdrawing silicon wafers or like articles from a supply magazine, transporting the same on a fluid bearing to a station where such articles are pre-aligned in sequence prior to treatment thereof at an adjacent mask aligner or like mechanism, and automatically discharging the articles following such treatment thereof onto another fluid bearing for transportation thereof into a discharge magazine. Improved sensor means is provided in conjunction with the supply magazine and discharge magazine for automatically indexing such magazines to feed and receive wafers in sequence moving relative thereto.
During pre-alignment operation, each wafer is automatically rotated on an air bearing until it is oriented with a flat edge surface thereof in a predetermined position, which position is maintained as the wafer is transferred into the mask aligner where fine orientation thereof is completed, either manually or automatically, in accordance with the type of mask aligner apparatus with which the pre-alignment apparatus of this invention is combined.

REFERENCES:
patent: 2293553 (1942-08-01), Magnusson
patent: 2791314 (1957-05-01), Meier
patent: 2855740 (1958-10-01), Noland et al.
patent: 2878954 (1959-03-01), Troske
patent: 3297134 (1967-01-01), Pastuszak
patent: 3415350 (1968-12-01), Murphy
patent: 3441121 (1969-04-01), Pastuszak
patent: 3618742 (1971-11-01), Blanchard
patent: 3645581 (1972-02-01), Lasch et al.
patent: 3651985 (1972-03-01), Smith
western Electric Technical Digest No. 5, Jan. 1967, p. 11.

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