Automatic wafer alignment system

Details Automatic wafer alignment system Automatic wafer alignment system

1980-05-19

1982-04-13

Britton, Howard

Facsimile and static presentation processing

Facsimile

Specific signal processing circuitry

3401463H, 358101, 364515, H04N 718

Patent

active

043250777

ABSTRACT:
In the alignment system disclosed, herein a raster scanned video signal representing a selected portion of the wafer surface is analyzed for diagonal reference lines or features on the surface of the wafer utilizing a swept gating technique which extracts desired image features from an obscuring or noisy background. A given point on the wafer surface is determined by locating two oppositely-inclined diagonal features, the point being defined by their intersection. These two features are searched for simultaneously and independently, minimizing the search time.

REFERENCES:
patent: 3216311 (1965-11-01), Bibbero
patent: 3988535 (1976-10-01), Hickman
patent: 4115803 (1978-09-01), Morton
patent: 4186412 (1980-01-01), Arimura
patent: 4203132 (1980-05-01), Schmitt

Affiliated with

Also associated with

Rating

Automatic wafer alignment system does not yet have a rating. At this time, there are no reviews or comments for this patent.

If you have personal experience with Automatic wafer alignment system, we encourage you to share that experience with our LandOfFree.com community. Your opinion is very important and Automatic wafer alignment system will most certainly appreciate the feedback.

Rate now

Comments { 0 }

Profile ID: LFUS-PAI-O-1419589