Fluent material handling – with receiver or receiver coacting mea – With signal – indicator – recorder – inspection means or exhibitor – Level or pressure in receiver
Reexamination Certificate
2006-12-05
2011-10-04
Maust, Timothy L (Department: 3751)
Fluent material handling, with receiver or receiver coacting mea
With signal, indicator, recorder, inspection means or exhibitor
Level or pressure in receiver
C141S004000, C141S008000, C141S083000, C141S094000, C141S192000
Reexamination Certificate
active
08028726
ABSTRACT:
Methods, systems and apparatus for automatically maintaining a pressure differential for the continuous delivery of a liquid to semiconductor manufacturing equipment. A refillable bulk liquid delivery system includes a plurality of canisters residing along a liquid flow path, whereby an over pressure is detected within at least one of the canisters. The over pressure may be detected using an automatic venting circuit or a programmable logic controller programmed for detecting such over pressures. The over pressure is then exhausted by removing excess pressure from the canister through a venting valve to maintain a Delta pressure across the canisters for continuously delivering the liquid along the liquid flow path.
REFERENCES:
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patent: 4582480 (1986-04-01), Lynch et al.
patent: 4622988 (1986-11-01), Takimoto et al.
patent: 5964254 (1999-10-01), Jackson
patent: 6435229 (2002-08-01), Noah et al.
patent: 6637475 (2003-10-01), Noah et al.
patent: 6955198 (2005-10-01), Wodjenski
Brown Katherine
DeLio & Peterson LLC
International Business Machines - Corporation
Maust Timothy L
Nowak Kelly M.
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