Data processing: generic control systems or specific application – Specific application – apparatus or process – Article handling
Reexamination Certificate
2003-04-10
2004-06-01
Tran, Khoi H. (Department: 3651)
Data processing: generic control systems or specific application
Specific application, apparatus or process
Article handling
C104S088010, C104S088020, C104S088030, C414S279000
Reexamination Certificate
active
06745102
ABSTRACT:
BACKGROUND OF THE INVENTION
1. Field of the Invention
The present invention relates to an automatic transporting system and method, and in particular to an automatic transporting system and method that enhances the transport efficiency of materials.
2. Description of the Related Art
Generally speaking, a semiconductor factory usually uses over-head shuttles (OHS) or over-head hoists (OHT) to transport wafers.
Referring to
FIG. 1
, a conventional automatic transporting system
1
includes a transport track
11
and multiple transport vehicles
12
,
13
,
14
and
15
. The transport vehicles
12
,
13
,
14
and
15
are over-head shuttles (OHS) or over-head hoists (OHT) and loaded with front opening unified pods (foup)
16
. Multiple foup stockers
17
and
18
are disposed beside the transport track
11
. When the transport vehicles
12
,
13
,
14
and
15
move to the foup stockers
17
and
18
, the foups
16
thereon are transported into the foup stockers
17
and
18
. Then, the transport vehicles
12
,
13
,
14
and
15
continue to move along the transport track
11
.
Nevertheless, the conventional automatic transporting system
1
has the following drawbacks. When the transport vehicle
14
moves to the foup stocker
17
to load or unload the foup
16
, the transport vehicle
15
behind the transport vehicle
14
has to stop to wait until the transport vehicle
14
has loaded or unloaded the foup
16
, thereby causing congestion in the automatic transporting system
1
. Furthermore, after the transport vehicle
14
has loaded or unloaded the foup
16
, the transport vehicle
14
still has to complete the transport track
11
. In addition, when one of the transport vehicles (e.g. transport vehicle
13
) malfunctions and stops, other transport vehicles (e.g. transport vehicles
14
and
15
) behind the malfunctioned transport vehicle stop as well.
Thus, there is a need to provide an improved automatic transporting system. The improved automatic is transporting system enhances the transport efficiency of the front opening unified pods. Even when one of the transport vehicles malfunctions and stops, the transport of the front opening unified pods and processing of the wafers are not adversely affected.
SUMMARY OF THE INVENTION
Accordingly, an object of the invention is to provide an automatic transporting system. The automatic transporting system comprises a main track, a plurality of transport vehicles, a loading and unloading track, a stocker, a rapid track and an emergency track. The plurality of transport vehicles move on the main track. The loading and unloading track has a first entrance and a first exit. The first entrance and first exit are connected to the main track. The transport vehicles enter the loading and unloading track via the first entrance and enter the main track via the first exit. The stocker is disposed beside the loading and unloading track. The transport vehicles enter the loading and unloading track and stop at the stocker to load and unload a material. The rapid track has a second entrance and a second exit. The second entrance and second exit are connected to the main track. The transport vehicles enter the rapid track via the second entrance and enter the main track via the second exit. The emergency track is connected to the main track. The transport vehicles leave the main track via the emergency track.
Preferably, the automatic transporting system further comprises a first interlock control device disposed on the connection between the first exit and main track to control the passing sequence of the transport vehicles.
Preferably, the automatic transporting system further comprises a second interlock control device disposed on the connection between the second exit and main track to control the passing sequence of the transport vehicles.
Preferably, the material is a front opening unified pod (foup).
Preferably, the stocker is a foup stocker.
Preferably, the transport vehicles are over-head shuttles (OHS) or over-head hoists (OHT).
Preferably, the automatic transporting system further comprises a robot disposed between the loading and unloading track and the stocker to load the material onto the transport vehicles or unload the material from the transport vehicles.
Another object of the invention is to provide an operation method for the automatic transporting system. The method comprises the steps of: guiding the transport vehicles to the loading and unloading track via the first entrance when the transport vehicles require loading or unloading a material; stopping the transport vehicles at the stocker to load or unload the material; guiding the transport vehicles to the main track via the first exit; guiding the transport vehicles to the rapid track via the second entrance to save the transit time thereof; guiding the transport vehicles to the main track via the second exit; and guiding the transport vehicles to the emergency track to leave the main track when the transport vehicles malfunction.
Preferably, the operation method further comprises a step of: using a robot to load the material onto the transport vehicles or unload the material from the transport vehicles.
Preferably, the robot is disposed between the loading and unloading track and the stocker.
Preferably, the operation method further comprises a step of: using a first interlock control device to control the passing sequence of the transport vehicles entering the main track via the first exit and moving on the main track.
Preferably, the first interlock control device is disposed on the connection between the first exit and main track.
Preferably, the operation method further comprises a step of: using a second interlock control device to control the passing sequence of the transport vehicles entering the main track via the second exit and moving on the main track.
Preferably, the second interlock control device is disposed on the connection between the second exit and main track.
REFERENCES:
patent: 3889797 (1975-06-01), Naito et al.
patent: 3929076 (1975-12-01), McRae et al.
patent: 4831540 (1989-05-01), Hesser
patent: 5267173 (1993-11-01), Tanizawa et al.
patent: 5551348 (1996-09-01), Matsumoto
patent: 6591961 (2003-07-01), Fukushima
Powerchip Semiconductor Corp.
Tran Khoi H.
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