Automatic test system for an analog micromirror device

Details Automatic test system for an analog micromirror device Automatic test system for an analog micromirror device

2005-05-03

2005-05-03

Bui, Bryan (Department: 2863)

Data processing: measuring, calibrating, or testing

Testing system

Of circuit

C702S116000, C702S117000

Reexamination Certificate

active

06889156

ABSTRACT:
An automatic tester for an analog micromirror device includes a computer having an ADC and DAC connected to its peripheral bus. A micromirror device under test is mounted on a black box containing a light source such as a laser and a position sensitive device. The light beam is reflected by the micromirror device onto the position sensitive device so that the deflection of the mirror in two axes can be measured. The output of the position sensitive device is amplified and coupled to the ADC via a tester board. The computer can test the micromirror device to detect mechanical failure and to measure the resonant frequency and Q of the driving coils, and SNR of the internal package feedback which measures the position of the mirror.

REFERENCES:
patent: 4385830 (1983-05-01), Webb et al.
patent: 6561648 (2003-05-01), Thomas
patent: 6639711 (2003-10-01), Orcutt
patent: 6714336 (2004-03-01), Orcutt et al.

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