Automatic temperature controlling system

Details Automatic temperature controlling system Automatic temperature controlling system

1996-09-11

1998-03-10

Bennett, Henry A.

Refrigeration

Automatic control

Of external fluid or means

622592, 62201, 62126, F25D 1702

Patent

active

057248257

ABSTRACT:
The present invention relates to an automatic temperature controlling system for semiconductor process, when one of the chillers in the temperature controlling system is out of order, then another chiller will automatically take over the function of the broken one by using the second temperature controlling path. The automatic temperature controlling system includes: at least two chambers used for performing a process having first temperature controlling paths for providing coolant circulations while the system is in normal condition, and having a second temperature controlling path for providing at least one coolant circulation while the system is in abnormal condition; at least two chillers are respectively connected to the chambers for controlling the temperature of the chambers; a plurality of first normal-on valves are used to control the condition of the first temperature controlling paths; a plurality of second normal-on valves are used to control the condition of the first temperature controlling paths; and a plurality of pairs of normal-off valves are used to control the condition of the second temperature controlling paths.

REFERENCES:
patent: 4210957 (1980-07-01), Spethmann
patent: 4372129 (1983-02-01), Bennett et al.
patent: 5201187 (1993-04-01), Yoshikawa et al.
patent: 5333676 (1994-08-01), Mizuno

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