Automatic recipe validation

Details Automatic recipe validation Automatic recipe validation

2007-10-16

2007-10-16

Picard, Leo (Department: 2125)

Data processing: generic control systems or specific application

Specific application, apparatus or process

Product assembly or manufacturing

Reexamination Certificate

active

11355598

ABSTRACT:
Automated comparison of tool recipes is described. A target recipe is digitally translated from a tool language to a standard language format to produce a translated recipe. The translated recipe is digitally compared to a source recipe that is also in the standard language format.

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Tseng et al., An effective Recipe Control and Managemet System(RCMS) Deployed in Semiconductor Manufacturing, 2004, IEEE, 135-138.

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