Automatic recipe adjust and download based on process control wi

Details Automatic recipe adjust and download based on process control wi Automatic recipe adjust and download based on process control wi

1997-12-05

2000-03-21

Grant, William

Data processing: generic control systems or specific application

Specific application, apparatus or process

Product assembly or manufacturing

700110, 438 14, 438 15, H01L 2166, G06F 1900

Patent

active

060412704

ABSTRACT:
A method of manufacturing semiconductor wafers using a simulation tool to determine a set of predicted wafer electrical test measurements that are compared to a set of target wafer electrical test measurements to obtain a set of optimized process parameters for the equipment for the next process. The optimized process parameters are compared to the equipment characteristics for the equipment of the next process and the process parameters for the next process are automatically adjusted.

REFERENCES:
patent: 5105362 (1992-04-01), Kotani
patent: 5497331 (1996-03-01), Iriki et al.
patent: 5661669 (1997-08-01), Mozumder et al.
patent: 5694325 (1997-12-01), Fukuda et al.
patent: 5866437 (1999-02-01), Chen et al.

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