Electric heating – Metal heating – By arc
Patent
1982-09-27
1985-10-29
Paschall, M. H.
Electric heating
Metal heating
By arc
219121PD, 219121PX, 156345, 414217, 414331, 414404, B23K 900, C23C 1500
Patent
active
045502390
ABSTRACT:
An automatic plasma processing device having a substantially vertically disposed plasma chamber in which a plurality of semiconductor wafers can be simultaneously processed with plasma. The automatic plasma processing device comprises a container cassette adapted to contain a plurality of wafers therein, a feeding mechanism for taking out the wafers one by one from the cassette and for feeding the same, a holding frame for receiving the wafers one by one from the feeding mechanism and for holding the same therein, a driving mechanism for moving the holding frame up and down into and out of the plasma chamber, a plasma generating mechanism for generating plasma in the plasma chamber, and a control system for controlling the aforesaid mechanisms. The device is simplified in construction and can automatically and successively process a large number of wafers, while at the same time having a compact construction.
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Hijikata Isamu
Nakane Hisashi
Nakayama Muneo
Uehara Akira
Cantarella John J.
Carrier Joseph P.
Paschall M. H.
Tokyo Denshi Kagaku Kabushiki Kaisha
Weiner Irving M.
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