Automatic photomask inspection system having image enhancement m

Details Automatic photomask inspection system having image enhancement m Automatic photomask inspection system having image enhancement m

1984-06-28

1986-12-30

Boudreau, Leo H.

Image analysis

Histogram processing

For setting a threshold

356237, 356390, 358106, G06K 940

Patent

active

046335048

ABSTRACT:
Optical inspection apparatus for detecting defects in a visually perceptible pattern including image acquistion means for inspecting the pattern on a pixel-by-pixel basis, developing digital data signals corresponding to each pixel and feeding the signals so developed to an imaging enhancement means. The imaging enhancement means compensates for equipment related degradations in the images and converts the digital data signal value corresponding to each pixel into a corrected signal value by operating on the digital data signal with a two dimensional finite impulse response filter. The corrected signal values of the image enhancement means are received by a defect detection means which evaluates the signal values for defects in the pattern. Any defects so determined are recorded and/or displayed on data recording means.

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