Automatic optical measurement method

Details Automatic optical measurement method Automatic optical measurement method

2005-07-26

2005-07-26

Rosenberger, Richard A. (Department: 2877)

Optics: measuring and testing

Of light reflection

By comparison

Reexamination Certificate

active

06922247

ABSTRACT:
In an automatic optical measurement method according to the invention, with a movable reflection plate6moved to place under an optical axis, light projected from a light projecting portion3ais received by a light receiving portion3bvia the movable reflection plate6,a stationary reflection plate11and the movable reflection plate6,whereas with the movable reflection plate6moved away from the optical axis and a reference8set on a sample stage10,light projected from the light projecting portion3ais received by the light receiving portion3bvia the reference8whereby a ratio between the intensities of the received lights is determined. During a sample measurement, light projected from the light projecting portion3awith the movable reflection plate6moved to place under the optical axis is received by the light receiving portion3bvia the movable reflection plate6, stationary reflection plate11and movable reflection plate6so that the intensity of light thus received and the above ratio are used for estimating an intensity of light to be measured with the reference, the estimated intensity of light being used for correcting an intensity of light received via a sample.

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S. Tadashi, “Measuring Instrument For Absolute Reflection Factor In Ultraviolet Range,:” Patent Abstract of Japan of JP01013438 (Jan. 18, 1989).

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