Automatic optical inspection using multiple objectives

Optics: measuring and testing – Position or displacement

Reexamination Certificate

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Details

C356S237200, C356S398000, C250S234000, C250S310000, C359S223100, C359S226200

Reexamination Certificate

active

07599075

ABSTRACT:
Apparatus and techniques for automated optical inspection (AOI) utilizing image scanning modules with multiple objectives for each camera are provided. A scanning mechanism includes optical components to sequentially steer optical signals from each of the multiple objectives to the corresponding camera.

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patent: 6621566 (2003-09-01), Aldrich et al.
patent: 7109464 (2006-09-01), Cartlidge et al.
patent: 7122786 (2006-10-01), Tochio et al.
patent: 7151246 (2006-12-01), Fein et al.
patent: 7338168 (2008-03-01), Cartlidge et al.

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