Automatic methods and systems for manufacturing recipe...

Details Automatic methods and systems for manufacturing recipe... Automatic methods and systems for manufacturing recipe...

2007-12-25

2007-12-25

Von Buhr, M. N. (Department: 2125)

Data processing: generic control systems or specific application

Generic control system, apparatus or process

Optimization or adaptive control

Reexamination Certificate

active

11423984

ABSTRACT:
Automatic methods and systems for manufacturing recipes feedback control. Relationships among manufacturing recipes are determined. Wafers are processed based on the manufacturing recipes. The wafers are measured by metrology tools after processing. Feedback information for the manufacturing recipes is acquired from the metrology tool. The manufacturing recipes are automatically modified according to the feedback information and the determined relationships.

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