Data processing: generic control systems or specific application – Specific application – apparatus or process – Product assembly or manufacturing
Reexamination Certificate
2006-05-18
2009-08-11
Rodriguez, Paul L (Department: 2123)
Data processing: generic control systems or specific application
Specific application, apparatus or process
Product assembly or manufacturing
C700S121000, C414S762000, C073S114310
Reexamination Certificate
active
07574280
ABSTRACT:
It is an object to provide an AGV that enables preventing a substrate and a manufacturing system from being contaminated due to another substrate with an adhering contaminant generated in a manufacturing process, and also a production system for a semiconductor device and a production management method for a semiconductor device, which use the AGV.In the present invention, air filtered through a filter is introduced into a containing portion of an AGV, and air in the containing portion containing a carrier is exhausted after filtering the air in the containing portion through another filter. As the filter used before discharging the air, a filter that enables filtering an impurity on the order of a submicron level is used. In addition, a carrier used before doping is changed to another carrier after doping, and CIM system is used to control driving of the AGV and selection of the carrier.
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Ohtani Hisashi
Tsuji Eiichiro
Rao Sheela
Robinson Eric J.
Robinson Intellectual Property Law Office P.C.
Rodriguez Paul L
Semiconductor Energy Laboroatory Co., Ltd.
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