Automatic material handling system, production system for...

Data processing: generic control systems or specific application – Specific application – apparatus or process – Product assembly or manufacturing

Reexamination Certificate

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Details

C700S095000, C700S121000, C414S217000

Reexamination Certificate

active

07058468

ABSTRACT:
It is an object to provide an AGV that enables preventing a substrate and a manufacturing system from being contaminated due to another substrate with an adhering contaminant generated in a manufacturing process, and also a production system for a semiconductor device and a production management method for a semiconductor device, which use the AGV.In the present invention, air filtered through a filter is introduced into a containing portion of an AGV, and air in the containing portion containing a carrier is exhausted after filtering the air in the containing portion through another filter. As the filter used before discharging the air, a filter that enables filtering an impurity on the order of a submicron level is used. In addition, a carrier used before doping is changed to another carrier after doping, and CIM system is used to control driving of the AGV and selection of the carrier.

REFERENCES:
patent: 6517304 (2003-02-01), Matsumoto
patent: 6547953 (2003-04-01), Suzuki et al.
patent: 6558962 (2003-05-01), Nishiki
patent: 6770109 (2004-08-01), Tanaka et al.
patent: 6795745 (2004-09-01), Ueno et al.
patent: 6826441 (2004-11-01), Yamagishi
patent: 11-322068 (1999-11-01), None

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