Automatic mask alignment

Details Automatic mask alignment Automatic mask alignment

1979-03-12

1982-10-05

Orsino, Jr., Joseph A.

Facsimile and static presentation processing

Facsimile

Specific signal processing circuitry

356138, 356152, H04N 718

Patent

active

043530877

ABSTRACT:
A target for use in aligning masks used in producing microcircuits which is of a size that can be printed on a microcircuit chip without interfering with the lines thereon, consisting only of lines vertically or diagonally disposed with respect to the image transducer is disclosed. Also disclosed is an automatic system for aligning such targets.

REFERENCES:
patent: 3838274 (1974-09-01), Doubek, Jr. et al.
patent: 3885877 (1975-05-01), Horwath et al.
patent: 4070117 (1978-01-01), Johannsmeier et al.

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