Material or article handling – Movable rack having superposed – charge-supporting elements,... – Rack moved vertically by elevating means
Patent
1985-10-22
1987-02-17
Paperner, Leslie J.
Material or article handling
Movable rack having superposed, charge-supporting elements,...
Rack moved vertically by elevating means
1983462, 198347, 414222, 414416, B65G 106
Patent
active
046436294
ABSTRACT:
In an automatic loader for automatically loading a flat unprocessed substrate to a substrate processing apparatus for processing the flat substrate and automatically unloading a processed substrate, the automatic loader has: a plurality of cassette stages for vertically moving cassettes having a plurality of substrates held horizontally and parallel to each other; a first substrate convey mechanism contacting a single door of the substrate processing apparatus and forming a common conveyance path of all substrates; a single substrate posture control stage arranged in contact with the first convey mechanism to correct a posture of the substrate to be fed in the substrate processing apparatus; second substrate convey mechanisms for forming at least one conveyance path between the plurality of cassette stages and the substrate posture control stage and exchanging and conveying the substrate; and substrate counters arranged in the respective conveyance paths of the second substrate convey mechanisms. The processed substrates are returned to the original cassette.
REFERENCES:
patent: 3902615 (1975-09-01), Levy et al.
patent: 4178113 (1979-12-01), Beaver et al.
patent: 4336438 (1982-06-01), Uehara
patent: 4405435 (1983-09-01), Tateishi et al.
patent: 4547247 (1985-10-01), Warenback et al.
Shirai Yasuyuki
Sugimoto Ryuji
Takahashi Nobuyuki
Anelva Corporation
Paperner Leslie J.
LandOfFree
Automatic loader does not yet have a rating. At this time, there are no reviews or comments for this patent.
If you have personal experience with Automatic loader, we encourage you to share that experience with our LandOfFree.com community. Your opinion is very important and Automatic loader will most certainly appreciate the feedback.
Profile ID: LFUS-PAI-O-1935222