Automatic LN2 distribution system for high-purity germanium...

Refrigeration – Storage of solidified or liquified gas – With measuring

Reexamination Certificate

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C062S060000

Reexamination Certificate

active

10689951

ABSTRACT:
A cryogenic fluid distribution device may include a fluid flow passage for distributing cryogenic fluid to an apparatus, an overflow passage positioned downstream of the apparatus, and a sensor coupled to the overflow passage, the sensor having an active component for determining if fluid is present in the overflow passage.

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