Automatic impedance matching apparatus and method

Details Automatic impedance matching apparatus and method Automatic impedance matching apparatus and method

1995-07-10

1997-04-15

Regan, Maura K.

Electricity: measuring and testing

Impedance, admittance or other quantities representative of...

Distributive type parameters

324637, 324638, G01R 2704

Patent

active

056213310

ABSTRACT:
Methods for rapidly adjusting the impedance of a variable impedance apparatus to match the impedance of a source to the impedance of a load, where the load impedance is a nonlinear function of the power delivered to the load, are described. In addition, an automatic impedance matching apparatus for matching the impedance of a source to the impedance of a load and for maintaining a stable plasma are described. The apparatus includes a variable impedance apparatus, a plurality of electric field sensors, a photosensitive detector, a data processor, and a memory.

REFERENCES:
patent: 4427936 (1984-01-01), Riblet et al.
patent: 4507602 (1985-03-01), Aguirre
patent: 4521728 (1985-06-01), Li
patent: 5274333 (1993-12-01), Ghannouch

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