Automatic guided vehicle, automatic guided vehicle system...

Details Automatic guided vehicle, automatic guided vehicle system... Automatic guided vehicle, automatic guided vehicle system...

2006-05-16

2006-05-16

Brahan, Thomas J. (Department: 3654)

Material or article handling

Device for emptying portable receptacle

Nongravity type

C414S414000, C414S936000, C414S937000

Reexamination Certificate

active

07044703

ABSTRACT:
Improvement of the workability in an automatic guided vehicle which carries and transfers a semiconductor wafer between stations in a semiconductor manufacturing plant etc.An automatic guided vehicle1is moved to an objective station after storing a wafer10in a buffer cassette with a transfer equipment3,the wafer10in a cassette5is transferred to a positioning device4by taking it up with the transfer equipment3,an ID information of the wafer10is read by a OCR43after truing up the position and direction of the wafer10by the positioning device4,the wafer10whose ID information is read is retained with a transfer hand31,another wafer10placed on the station then is removed by the other transfer hand31,the wafer10whose ID information is read is transferred to the station in the predetermined position and direction and the ID information is controlled to transmit to the station.

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