Automatic generation of PID parameters for a scanning probe...

Data processing: generic control systems or specific application – Generic control system – apparatus or process – Optimization or adaptive control

Reexamination Certificate

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C700S029000, C850S004000

Reexamination Certificate

active

07987006

ABSTRACT:
Linear PID controllers have a transfer function that resembles the frequency response of a notch filter. The PID parameters, KP, KI, and KD(proportional, integral, and derivative gains, respectively) can be extracted from the parameters of a linear notch filter. The linearized modes of scanning probe microscope (SPM) actuators have frequency responses that resemble those of simple second order resonance. Reasonable feedback control can be achieved by an inverse dynamics model of the resonance. A properly parameterized notch filter can cancel the dynamics of a resonance to give good closed-loop response.

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