Automatic four-point probe

Details Automatic four-point probe Automatic four-point probe

1978-07-28

1980-05-20

Rolinec, Rudolph V.

Electricity: measuring and testing

Measuring, testing, or sensing electricity, per se

With rotor

324 64, 324158P, G01R 3102, G01R 2714

Patent

active

042041554

ABSTRACT:
An automatic four-point probe mechanism, containing various sensors, motors, and precision machine parts necessary to accurately and repeatedly lower a four-point resistivity head onto a semi-conductor slice surface is ideally suited for operator independent measurements of semi-conductor resistivity. The automatic four-point probe finds application in quality assurance incoming-outgoing inspections, materials process control, epitaxial in-process control, diffusion in-process control, thin-film process control, and similar applications. In the preferred embodiment, all torsional forces are eliminated from the probe head, thus avoiding scratch damage to the semi-conductor surface and providing for uniform depth penetration of the probe into the semi-conductor surface and great repeatability of test readings.

REFERENCES:
patent: 3134064 (1964-05-01), Narbro
patent: 3333274 (1967-07-01), Forcier
patent: 3437929 (1969-04-01), Glenn
patent: 3996517 (1976-12-01), Fergason et al.

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