Automatic focusing system for a microscope

Details Automatic focusing system for a microscope Automatic focusing system for a microscope

1985-01-22

1987-01-27

Nelms, David C.

Radiant energy

Photocells; circuits and apparatus

Photocell controls its own optical systems

250204, G01J 120

Patent

active

046395873

ABSTRACT:
An automatic microscope focusing system including a light source 44, a dual channel fiber optics bundle 56 and 58, chopper means 54 for alternately admitting light to the channels, a reticle 66 and associated optics to cast alternating images onto the surface of an inspected article W, return masks 82 and 88, and associated detectors 86 and 92 for inspecting the alternating reticle images, and control circuitry 36 and 38 responsive to the detector outputs and operative to drive the system microscope 10 into focus. The preferred embodiment also includes a flipping pupil 60 for accommodating particular microscope objectives.

REFERENCES:
patent: 4011446 (1977-03-01), Swanberg
patent: 4255029 (1981-03-01), Freudenschuss

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