Automatic focusing method and apparatus

Optical: systems and elements – Single channel simultaneously to or from plural channels

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369 54, G02B 2710, G11B 4390

Patent

active

058926224

ABSTRACT:
An automatic focussing method and an automatic focussing device capable of performing correct focussing. The relative position between an object 4 and an objective lens 2 is measured for focussing. The laser light illuminated on the object is transmitted through a cylindrical lens 7 so as to be condensed only as to one direction. The laser light condensed as to the one direction is illuminated via the objective lens 2 on the object 4 in a linear form. The illuminated laser light reflected by the object 4 is integrated and detected by a detection unit. The relative position between the object and the objective lens is measured from the spot of the detected reflected laser light in order to perform focussing.

REFERENCES:
patent: 5195081 (1993-03-01), Usui
patent: 5225886 (1993-07-01), Koizumi et al.
patent: 5721605 (1998-02-01), Mizutani
patent: 5726757 (1998-03-01), Kato et al.

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