Automatic focusing apparatus in optical drawing machine

Details Automatic focusing apparatus in optical drawing machine Automatic focusing apparatus in optical drawing machine

1982-09-15

1985-04-23

Hix, L. T.

Radiant energy

Ionic separation or analysis

Static field-type ion path-bending selecting means

354400, 354402, 354406, 250201, G03B 4100, G01J 120

Patent

active

045126429

ABSTRACT:
Automatic focusing apparatus in an optical drawing machine, comprising a drawing optical means having a dichroic mirror which transmits light for drawing and reflects light for detecting the focus to apply the focus detecting light to which a photosensitive material is insensitive onto the latter, an imaging lens means, and a focus detecting device for detecting whether the surfaces of the photosensitive material are located in the depth of focus of the drawing optical means.

REFERENCES:
patent: 3969575 (1976-07-01), Gerritsen et al.
patent: 3969576 (1976-07-01), Boonstra et al.
patent: 3984845 (1976-10-01), Tashiro et al.
patent: 4132888 (1979-01-01), Kondo
patent: 4376303 (1983-03-01), Lurie
patent: 4383757 (1983-05-01), Phillips

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