Automatic fluorine control system

Details Automatic fluorine control system Automatic fluorine control system

1999-08-04

2000-11-21

Scott, Jr., Leon

Coherent light generators

Particular active media

Gas

372 59, 372 57, H01S 310

Patent

active

061513490

ABSTRACT:
An excimer laser system with an automatic fluorine control system to permit precise control of the fluorine concentration within an F.sub.2 "sweet spot" in a gas discharge laser chamber. This is done with a computer control system which monitors laser parameters, determines .DELTA.E/.DELTA.V, the change of pulse energy with voltage, and automatically and precisely controls the fluorine concentration based on .DELTA.E/.DELTA.V without the need to actually measure the fluorine concentration.

REFERENCES:
patent: 6018537 (2000-01-01), Hofmann et al.

Affiliated with

Also associated with

Rating

Automatic fluorine control system does not yet have a rating. At this time, there are no reviews or comments for this patent.

If you have personal experience with Automatic fluorine control system, we encourage you to share that experience with our LandOfFree.com community. Your opinion is very important and Automatic fluorine control system will most certainly appreciate the feedback.

Rate now

Comments { 0 }

Profile ID: LFUS-PAI-O-1264838