Automatic etching system

Details Automatic etching system Automatic etching system

1977-04-04

1977-11-29

Van Horn, Charles E.

Fluid handling

Self-proportioning or correlating systems

Mixture condition maintaining or sensing

156345, 156642, C23F 102

Patent

active

040600971

ABSTRACT:
The composition of etchant solution withdrawn from an etcher is monitored to diagnose a component deficiency. A light sensor is responsive to the color density of light rays passing through the etchant. A meter relay is responsive to the light sensor and if the color density of the etchant falls outside preset levels a pump is energized causing addition of a constituent component into the etchant. A second light sensor senses the color density of the light rays passing through the etchant after the addition of the constituent component. A second meter relay is responsive to the second light sensor. If no improvement of the etchant color is detected, the second meter relay causes the discontinuance of the constituent component addition and switches to the addition of another constituent component.

REFERENCES:
patent: 3381699 (1968-05-01), Coffman
patent: 3505135 (1970-04-01), Lindstrom
patent: 3526560 (1970-09-01), Thomas
patent: 3605775 (1971-09-01), Zaander et al.
patent: 3773222 (1973-11-01), Fiebiger
patent: 3964956 (1976-06-01), Snyder
patent: 4016079 (1977-04-01), Severin

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