Automatic edge grinder

Details Automatic edge grinder Automatic edge grinder

1985-11-04

1987-01-27

Whitehead, Harold D.

Abrasive tool making process, material, or composition

With carbohydrate or reaction product thereof

51 5R, 51101R, 5116572, 51283E, B24B 910

Patent

active

046386017

ABSTRACT:
The edge profile machine employs a centering station in which a photosensor measures a number of points on the periphery of a wafer so that the shape of the wafer and location of the geometric center can be determined in a computer. A rotatable head serves to position the geometric center of the wafer on a fixed axis and the wafer transferred to a grinding station with the geometric center located on the central axis of a rotating chuck. During grinding, a grinding wheel is moved in accordance with the differences between the detected shape of the wafer and a predetermined shape. The grinding wheel is moved on an axis perpendicular to an axis passing through the centering station and grinding station in accordance with signals received from the computer.

REFERENCES:
patent: 3584421 (1971-06-01), Lob
patent: 3913272 (1975-10-01), Johnson
patent: 4023084 (1977-05-01), Owa
patent: 4203259 (1980-05-01), Haddock
patent: 4344260 (1982-08-01), Ogiwara
patent: 4528780 (1985-07-01), Halberschmidt

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