Automatic developing device

Details Automatic developing device Automatic developing device

1986-04-14

1988-07-05

Mathews, A. A.

Cleaning and liquid contact with solids

Apparatus

Sequential work treating receptacles or stations with means...

354325, 134 57R, 134151, 134153, 134198, G03D 504, B08B 302, H01L 21306

Patent

active

047558440

ABSTRACT:
This invention is described an automatic developing device. The automatic developing device according to this invention is comprising: a stage on which the substrate to be treated is disposed after application of the resist and the patterning step is complete; a sealed frame capable of movement, that is used to sealingly cover the substrate disposed on this stage; a supply pipe for supplying developer into this sealed frame; a treatment vessel in which installs the stage, the sealing frame and the developer supply pipe; and at least one nozzle which sprays rinsing liquid provider in this treatment vessel.

REFERENCES:
patent: 3727620 (1973-04-01), Orr
patent: 3769992 (1973-11-01), Wallestad
patent: 3990462 (1976-11-01), Elftmann et al.
patent: 4015615 (1977-04-01), Weber et al.
patent: 4027686 (1977-06-01), Shortes et al.
patent: 4132567 (1979-01-01), Blackwood
patent: 4161356 (1979-07-01), Giffin et al.
patent: 4286541 (1981-09-01), Blackwood
patent: 4469424 (1984-09-01), Matsui et al.
patent: 4557785 (1985-10-01), Ohkuma

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