Automatic developing apparatus

Details Automatic developing apparatus Automatic developing apparatus

1986-11-17

1988-05-17

Mathews, A. A.

Cleaning and liquid contact with solids

Apparatus

Sequential work treating receptacles or stations with means...

354324, 354325, 354330, 134153, G03D 302

Patent

active

047454229

ABSTRACT:
An automatic developing apparatus comprises a developing tank and a pipe for introducing a developing solution into the developing tank. The developing tank is constituted by a stage on which a substrate is to be set, and a processing case movable relative to the stage, to receive said stage.

REFERENCES:
patent: 3401705 (1968-09-01), Goldware
patent: 3727620 (1973-04-01), Orr
patent: 3769992 (1973-11-01), Wallestad
patent: 3990462 (1976-11-01), Elftmann et al.
patent: 4092176 (1978-05-01), Kozai et al.
patent: 4161356 (1979-07-01), Giffin et al.
patent: 4197000 (1980-04-01), Blackwood
patent: 4429983 (1984-02-01), Cortellino et al.
Japanese Patent Application No. 60-93139 Corresponding to U.S. Ser. No. 06/851,206 filed Apr. 14, 1986, entitled "Automatic Developing Device".

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