Automatic developing apparatus

Details Automatic developing apparatus Automatic developing apparatus

1990-02-02

1991-06-25

Valentine, Donald R.

Chemistry: electrical and wave energy

Apparatus

Electrolytic

204273, 324439, C25D 2114, C25D 2110, G01N 2702

Patent

active

050264672

ABSTRACT:
An improvement in an automatic developing apparatus in which an electroconductive body upon which a predetermined pattern has been written on a resist film applied to a surface of that body, is placed in a solution of developer and containing an electrode, and then the value of the change of the current that flows between the electroconductive body and the electrode is used as the basis for then determining the point at which developing of the written pattern is completed is disclosed.
The automatic developing apparatus comprises

REFERENCES:
patent: 3531252 (1970-09-01), Rivers
patent: 4102756 (1978-07-01), Castellani et al.
patent: 4497692 (1985-02-01), Gelchinski et al.
patent: 4755844 (1988-07-01), Tsuchiya et al.

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