Automatic defect reclassification of known propagator defects

Details Automatic defect reclassification of known propagator defects Automatic defect reclassification of known propagator defects

1997-10-22

2000-03-07

Grant, William

Data processing: generic control systems or specific application

Specific application, apparatus or process

Product assembly or manufacturing

700121, G06F 1900

Patent

active

060352442

ABSTRACT:
A defect management system with a method to update a database with defect data concerning propagator defect data. Defect data obtained from each layer formed on a semiconductor wafer is stored in a relational database. Defect data determined in a current layer to be defect data for a defect observed in a previous layer is defined as data concerning a propagator defect. Propagator defect data is used to update the data in the database relating to the previous layer.

REFERENCES:
patent: 5649169 (1997-07-01), Berezin et al.
patent: 5761064 (1998-06-01), La et al.
patent: 5777901 (1998-07-01), Berezin et al.
patent: 5801965 (1998-09-01), Takagi et al.

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