Automatic defect inspection apparatus for color filter

Details Automatic defect inspection apparatus for color filter Automatic defect inspection apparatus for color filter

1994-04-18

1995-03-21

Evans, F. L.

Optics: measuring and testing

Inspection of flaws or impurities

Having predetermined light transmission regions

356394, 356398, G01N 2188

Patent

active

054001358

ABSTRACT:
An automatic defect inspection apparatus for a color filter includes a light source for radiating light onto a color filter having a spatially periodical repetitive structure of red, green, and blue, a detector for detecting light from the color filter, and a processor for executing arithmetic processing of the output signal from the detector. In the apparatus, the detector is arranged to detect the light radiated form the light source and transmitted through the color filter, and a diaphragm for limiting the area of the transmitted light incident on the detector in association with an integer multiple of the spatially periodical repetitive structure of red, green, and blue is arranged.

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