Automatic defect classification (ADC) reclassification engine

Details Automatic defect classification (ADC) reclassification engine Automatic defect classification (ADC) reclassification engine

1997-07-17

1999-10-12

Au, Amelia

Image analysis

Applications

Manufacturing or product inspection

348126, 36446817, 364490, 382224, 382232, G06K 900

Patent

active

059664592

ABSTRACT:
A method of determining classification codes for defects occurring in semiconductor manufacturing processes and for storing the information used to determine the classification codes. A wafer is selected from a production lot after the lot is sent through a first manufacturing process. The selected wafer is scanned to determine if there are defects on the wafer. Images of selected defects are examined and a numerical value is assigned to each of N elemental descriptor terms describing each defect. A classification code is determined for each defect based upon the numerical values assigned to the N elemental descriptor terms. The classification code and numerical values assigned to the N elemental descriptor terms are stored in a database. The wafer is sent through each sequential process and classification codes are assigned to additional defects selected after each sequential process. The classification codes and numerical values assigned to the N elemental descriptor terms for the additional selected defects are stored in the database. The stored numerical values assigned to the N elemental descriptor terms to modify the classification code. All of the defects stored in the database are assigned new classification codes in accordance with the modified classification code. A new classification code can be generated and all of the stored defects are assigned new classification codes in accordance with the new database.

REFERENCES:
patent: 3864559 (1975-02-01), Mori et al.
patent: 4449818 (1984-05-01), Yamaguchi et al.
patent: 4618938 (1986-10-01), Sandland et al.
patent: 5010551 (1991-04-01), Goldsmith et al.
patent: 5014185 (1991-05-01), Saito et al.
patent: 5086397 (1992-02-01), Schuster et al.
patent: 5539752 (1996-07-01), Berzin et al.
patent: 5541846 (1996-07-01), Secrest
patent: 5649169 (1997-07-01), Berezin et al.
patent: 5699447 (1997-12-01), Alumot et al.
patent: 5777901 (1995-09-01), Berezin et al.

Affiliated with

Also associated with

Rating

Automatic defect classification (ADC) reclassification engine does not yet have a rating. At this time, there are no reviews or comments for this patent.

If you have personal experience with Automatic defect classification (ADC) reclassification engine, we encourage you to share that experience with our LandOfFree.com community. Your opinion is very important and Automatic defect classification (ADC) reclassification engine will most certainly appreciate the feedback.

Rate now

Comments { 0 }

Profile ID: LFUS-PAI-O-659949