Automatic control system of integrated circuits

Details Automatic control system of integrated circuits Automatic control system of integrated circuits

1989-06-13

1990-09-04

Eisenzopf, Reinhard J.

Electricity: measuring and testing

Measuring, testing, or sensing electricity, per se

With rotor

324158P, 324158R, G01R 3500, G01R 3106

Patent

active

049547747

ABSTRACT:
A system of automatic control of integrated circuits, in which a wafer of integrated circuits (10) to be tested is supported by a sample carrier (61) and is electrically connected to a probe card (60). This system includes (a) a water-tight chamber (20) traversed by a flow or dry inert gas under excess pressure; (b) a mechanical assembly (40) of platforms (41, 42, 43, 44) for controlling the displacements of the wafer to be tested, with interpolation of a thermally insulated wedge (46) between the assembly of platforms and the sample carrier (61); and (c) a device (80) for cooling the sample carrier (61) internal of the system and including a container (81) of cooling liquid, a tube being prolonged in the cooling liquid to conduct the latter to a cooling cavity (63) internal of the sample carrier, and a device (64, 65) for exhausting the gaseous liquid appearing in the cooling cavity.

REFERENCES:
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patent: 4607220 (1986-08-01), Hollman
patent: 4734872 (1988-03-01), Eager et al.
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patent: 4757255 (1988-07-01), Margozzi
patent: 4787752 (1988-11-01), Fraser et al.
patent: 4791364 (1988-12-01), Kuffis et al.

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