Automatic control of integrated circuit trimming

Metal working – Method of mechanical manufacture – Assembling or joining

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Details

29574, 29577R, 29584, B01J 1700

Patent

active

041820240

ABSTRACT:
In a monolithic integrated circuit having a combination of bipolar and junction field effect transistors, a pulsed laser is employed to trim the transistors to achieve balanced circuit performance. The laser is applied to individual circuits in wafer form using a step and repeat operation. Each circuit is measured, the transistor to be trimmed determined and a first trim performed. The circuit is remeasured and, if still out of specification, retrimmed. The process is repeated until a desired degree of balance is achieved.

REFERENCES:
patent: 3581385 (1971-06-01), Lathrop
patent: 3688389 (1972-09-01), Nakanuma
Solid State Technology, May 1969, "Laser Adjustable Resistors for Precision Mono, Circuits, by Braun & Breuer, pp. 56-62.
Industrial Lasers & Their Applications, 1974, Harry, McGraw-Hill, pp. 136-138.

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