Automatic calibration of a wafer-handling robot

Details Automatic calibration of a wafer-handling robot Automatic calibration of a wafer-handling robot

2005-08-23

2005-08-23

Black, Thomas G. (Department: 3661)

Data processing: generic control systems or specific application

Specific application, apparatus or process

Robot control

C700S217000, C700S218000, C700S189000, C700S190000, C700S245000, C700S258000, C700S259000, C700S261000, C700S262000, C700S260000, C700S054000, C700S008000, C318S560000, C901S015000, C901S016000, C901S021000, C901S039000, C340S668000, C701S023000, C118S715000, C118S712000, C118S728000

Reexamination Certificate

active

06934606

ABSTRACT:
In one embodiment, a wafer-handling robot in a wafer processing system is automatically calibrated by determining an orientation of the robot relative to a chassis of the wafer processing system, determining hand-off coordinates of a load port in the wafer processing system, and determining hand-off coordinates of a load lock in the wafer processing system. Also disclosed is a calibration fixture for automatically calibrating the wafer-handling robot to the load port.

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Lento, Wafer Handling And FAB Automation: Using an integrated controller to manage wafer-handling systems, 2001, Internet, pp. 1-8.
Berkeley Process Control, Inc., Semiconductor Components, 2003, Internet, pp. 1-2.
Robotic alignment overview, Microtool.net; Webpage [online][retrieved on Sep. 22, 2003]; Downloaded from the internet: URL:www.microtool.net.

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