Automatic accurate alignment system

Details Automatic accurate alignment system Automatic accurate alignment system

1985-05-09

1988-07-12

Boudreau, Leo H.

Image analysis

Histogram processing

For setting a threshold

382 48, 358101, G06K 958

Patent

active

047575506

ABSTRACT:
An automatic accurate alignment system for positioning an object to be worked which has a certain pattern on its surface at a required position. The system performs primary positioning of the object to be worked on the basis of low magnification pattern matching with respect to at least a part of the image of the object magnified at a relatively low magnification. Thereafter, the system performs secondary positioning of the object to be worked on the basis of high magnification pattern matching with respect to at least a part of the image of the object magnified at a relatively high magnification.

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patent: 4625330 (1986-11-01), Higgins
patent: 4672557 (1987-06-01), Tamura

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