Automated systems and methods for adapting semiconductor...

Details Automated systems and methods for adapting semiconductor... Automated systems and methods for adapting semiconductor...

2007-09-07

2010-11-02

Rodríguez, Saúl J (Department: 3652)

Material or article handling

Process

Of material charging or discharging of a chamber of a type...

C414S805000

Reexamination Certificate

active

07824146

ABSTRACT:
Automated systems and methods for adapting semiconductor fabrication tools to process wafers of different diameters are described. In one embodiment, a method comprises providing a semiconductor fabrication tool, placing an adapter ring on a plurality of ring holders via a robotic arm, the plurality of ring holders being operable to support the adapter ring at a vertical distance from a stage heater and the stage heater being movable in a vertical direction, placing a first semiconductor wafer on the stage heater via the robotic arm, the first semiconductor wafer having a first diameter, and moving the stage heater upward to receive the adapter ring from the plurality of ring holders and to cover a portion of the stage heater during processing of the first semiconductor wafer.

REFERENCES:
patent: 5980187 (1999-11-01), Verhovsky
patent: 6331095 (2001-12-01), Hiroki
patent: 6676761 (2004-01-01), Shang et al.
patent: 6887317 (2005-05-01), Or et al.
patent: 2004/0139917 (2004-07-01), Yamaguchi et al.

Affiliated with

Also associated with

Rating

Automated systems and methods for adapting semiconductor... does not yet have a rating. At this time, there are no reviews or comments for this patent.

If you have personal experience with Automated systems and methods for adapting semiconductor..., we encourage you to share that experience with our LandOfFree.com community. Your opinion is very important and Automated systems and methods for adapting semiconductor... will most certainly appreciate the feedback.

Rate now

Comments { 0 }

Profile ID: LFUS-PAI-O-4174077