Automated system for handling and processing wafers within a...

Details Automated system for handling and processing wafers within a... Automated system for handling and processing wafers within a...

2006-06-27

2006-06-27

Brahan, Thomas J. (Department: 3652)

Cleaning and liquid contact with solids

Processes

With work or work parts movable during treatment

C414S416110, C414S938000

Reexamination Certificate

active

07067018

ABSTRACT:
A workpiece handling and processing system has a interface section for loading wafers from cassettes into carriers. The wafers are lifted out of cassettes by a buffer elevator and moved into a position over an open carrier by a buffer robot. A comb elevator lifts combs entirely through the open cassette, to transfer the wafers from the buffer robot into the carrier. A process robot moves loaded carriers from the interface section to one or more process chambers in a process section. The advantages of processing wafers within a carrier are achieved within a compact space and with high throughput.

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