Automated state estimation system for cluster tools and a...

Details Automated state estimation system for cluster tools and a... Automated state estimation system for cluster tools and a...

2006-09-26

2009-06-09

Jarrett, Ryan A (Department: 2121)

Data processing: generic control systems or specific application

Specific application, apparatus or process

Product assembly or manufacturing

C700S108000

Reexamination Certificate

active

07546177

ABSTRACT:
By using weighted entity states for representing a state of a cluster tool, a highly efficient technique for the measurement and monitoring of cluster tool characteristics, such as reliability, availability and maintainability, is provided. For example, individual entities of the cluster tool may be weighted according to their capacity and corresponding entity states may be ranked in accordance with a predefined hierarchy structure, thereby enabling an efficient combination of weighted entity states so as to represent the cluster tool state.

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patent: 6724404 (2004-04-01), Hann, Jr. et al.
patent: 2004/0034555 (2004-02-01), Dismukes
patent: 2004/0148047 (2004-07-01), Dismukes et al.
International Search Report and Written Opinion mailed Jun. 5, 2007.

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