Automated spatial flipping apparatus and system for...

Details Automated spatial flipping apparatus and system for... Automated spatial flipping apparatus and system for...

2011-06-14

2011-06-14

Mancho, Ronnie (Department: 3664)

Data processing: generic control systems or specific application

Specific application, apparatus or process

Robot control

C414S225010, C901S019000, C901S036000

Reexamination Certificate

active

07962242

ABSTRACT:
A spatial photomask flipper provides up to four access gates for an unloading of a clamped photomask after its reorientation along a single photomask transfer axis. The clamping frames holding the photomask are secured by a locking control cam that prevents their inadvertent opening in any other but the two main flip orientations. The flipper is part of an automated system including a digital camera and an image recognition algorithm that interpret an arbitrary initial photomask loading orientation from a circumferential photomask identification number. An eventual pellicle on the photomask may be also automatically detected via a pellicle detection sensor. Alternately, the digital camera may be employed for pellicle detection together with a pellicle detection algorithm that processes the digital image for well known components of the pellicle such as the pellicle frame.

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