Automated single cassette load mechanism for scrubber

Details Automated single cassette load mechanism for scrubber Automated single cassette load mechanism for scrubber

1976-05-11

1977-12-13

Oresky, Lawrence J.

214 1BT, B65H 106

Patent

active

040624633

ABSTRACT:
Apparatus is provided for transferring a selected one of a plurality of workpieces, such as silicon wafers or masks, from within a cassette containing the workpieces to a processing station for scrubbing, etching, etc. The apparatus includes a wafer-supporting arm which is movable between a retracted position within the cassette and a scrubbing station for moving the selected one of the silicon wafers from its position within the cassette to the scrubbing station and for returning the selected wafer from the scrubbing station to the cassette. A selection device then operates to move the cassette downwardly so that the next silicon wafer to be cleaned is in position to be picked up by the wafer-supporting arm when it is next moved between its retracted position and the scrubbing station.

REFERENCES:
patent: 3516386 (1970-06-01), Landwehr et al.
patent: 3645581 (1972-02-01), Lasch, Jr. et al.
IBM Technical Disclosure Bulletin, vol. 16, No. 2, by Fink et al., pp. 427-428 (7/1973).

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