Cleaning and liquid contact with solids – Apparatus – With work feeding and/or discharging means
Reexamination Certificate
2006-07-25
2006-07-25
Stinson, Frankie L. (Department: 1746)
Cleaning and liquid contact with solids
Apparatus
With work feeding and/or discharging means
C134S066000, C134S078000, C134S902000
Reexamination Certificate
active
07080652
ABSTRACT:
A semiconductor processing system for wafers or other semiconductor articles. The system uses an interface section at an end of the machine accessible from the clean room. A plurality of processing stations are arranged away from the clean room interface. A transfer subsystem removes wafers from supporting carriers, and positions both the wafers and carriers onto a carrousel which is used as an inventory storage. Wafers are shuttled between the inventory and processing stations by a robotic conveyor which is oriented to move toward and away from the interface end. The system processes the wafers without wafer carriers.
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Curtis Gary L.
Davis Jeffrey A.
Perkins Coie LLP
Semitool Inc.
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