Automated semiconductor processing systems

Details Automated semiconductor processing systems Automated semiconductor processing systems

2005-03-29

2005-03-29

Stinson, Frankie L. (Department: 1746)

Cleaning and liquid contact with solids

Apparatus

Sequential work treating receptacles or stations with means...

C134S148000, C134S157000, C134S902000

Reexamination Certificate

active

06871655

ABSTRACT:
A semiconductor processing system for wafers or other semiconductor articles. The system uses an interface section at an end of the machine accessible from the clean room. A plurality of processing stations are arranged away from the clean room interface. A transfer subsystem removes wafers from supporting carriers, and positions both the wafers and carriers onto a carrousel which is used as an inventory storage. Wafers are shuttled between the inventory and processing stations by a robotic conveyor which is oriented to move toward and away from the interface end. The system processes the wafers without wafer carriers.

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