Automated semiconductor processing systems

Details Automated semiconductor processing systems Automated semiconductor processing systems

1996-07-15

1997-09-09

Bennett, Henry A.

Drying and gas or vapor contact with solids

Apparatus

With apparatus using centrifugal force

414938, 414331, 414416, 34312, 34317, 34184, 34328, F26B 1724

Patent

active

056643373

ABSTRACT:
A semiconductor processing system for wafers or other semiconductor articles. The system uses an interface section at an end of the machine accessible from the clean room. A plurality of processing stations are arranged away from the clean room interface. A transfer subsystem removes wafers from supporting carriers, and positions both the wafers and carriers onto a carrousel which is used as an inventory storage. Wafers are shuttled between the inventory and processing stations by a robotic conveyor which is oriented to move toward and away from the interface end. The system processes the wafers without wafer carriers.

REFERENCES:
patent: 3968885 (1976-07-01), Hassan et al.
patent: 4300581 (1981-11-01), Thompson
patent: 4313266 (1982-02-01), Tam
patent: 4431361 (1984-02-01), Bayne
patent: 4449885 (1984-05-01), Hertel et al.
patent: 4457661 (1984-07-01), Flint et al.
patent: 4571850 (1986-02-01), Hunt et al.
patent: 4651440 (1987-03-01), Karl
patent: 4693017 (1987-09-01), Oehler et al.
patent: 4747928 (1988-05-01), Takahashi et al.
patent: 4776744 (1988-10-01), Stonestreet et al.
patent: 4795299 (1989-01-01), Boys et al.
patent: 4840530 (1989-06-01), Nguyen
patent: 4907349 (1990-03-01), Aigo
patent: 4924890 (1990-05-01), Giles
patent: 4962726 (1990-10-01), Matsushita et al.
patent: 5026239 (1991-06-01), Chiba et al.
patent: 5054988 (1991-10-01), Shiraiwa
patent: 5055036 (1991-10-01), Asano et al.
patent: 5110248 (1992-05-01), Asano et al.
patent: 5125784 (1992-06-01), Asano
patent: 5168886 (1992-12-01), Thompson et al.
patent: 5168887 (1992-12-01), Thompson et al.
patent: 5174045 (1992-12-01), Thompson et al.
patent: 5178639 (1993-01-01), Nishi
patent: 5180273 (1993-01-01), Sakaya et al.
patent: 5186594 (1993-02-01), Toshima et al.
patent: 5224503 (1993-07-01), Thompson et al.
patent: 5232328 (1993-08-01), Owczarz et al.
patent: 5232511 (1993-08-01), Bergman
patent: 5235995 (1993-08-01), Bergman et al.
patent: 5238500 (1993-08-01), Bergman
patent: 5301700 (1994-04-01), Kamikawa et al.
patent: 5332445 (1994-07-01), Bergman
patent: 5388945 (1995-02-01), Garric et al.
patent: 5445172 (1995-08-01), Thompson et al.
patent: 5464313 (1995-11-01), Ohsawa
patent: 5500081 (1996-03-01), Bergman

Affiliated with

Also associated with

Rating

Automated semiconductor processing systems does not yet have a rating. At this time, there are no reviews or comments for this patent.

If you have personal experience with Automated semiconductor processing systems, we encourage you to share that experience with our LandOfFree.com community. Your opinion is very important and Automated semiconductor processing systems will most certainly appreciate the feedback.

Rate now

Comments { 0 }

Profile ID: LFUS-PAI-O-62871