Automated semiconductor processing system

Details Automated semiconductor processing system Automated semiconductor processing system

2005-09-13

2005-09-13

Brahan, Thomas J. (Department: 3652)

Cleaning and liquid contact with solids

Processes

With work or work parts movable during treatment

C414S416030, C414S416080, C414S937000

Reexamination Certificate

active

06942738

ABSTRACT:
An automated semiconductor processing system has an indexer bay perpendicularly aligned with a process bay within a clean air enclosure. An indexer in the indexer bay provides stocking or storage for work in progress semiconductor wafers. Process chambers are located in the process bay. A process robot moves between the indexer bay and process bay to carry semi-conductor wafers to and from the process chambers. The process robot has a robot arm vertically moveable along a lift rail. Semiconductor wafers are carried offset from the robot arm, to better avoid contamination. The automated system is compact and requires less clean room floor space.

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