Automated processing system

Details Automated processing system Automated processing system

2007-10-09

2007-10-09

Brahan, Thomas J. (Department: 3652)

Material or article handling

Device for emptying portable receptacle

Nongravity type

C414S414000, C414S937000

Reexamination Certificate

active

10334688

ABSTRACT:
An automated processing system has an indexer bay perpendicularly aligned with a process bay within a clean air enclosure. An indexer in the indexer bay provides stocking or storage for work in progress wafers or articles. Process chambers are located in the process bay. A transfer robot moves wafers from a pod unsealed at a docking station into a carrier at a transfer station. The carrier has tapered or stepped outside surfaces engaging corresponding inside surfaces on a rotor within a process chamber. A process robot moves between the indexer bay and process bay to carry wafers to and from the process chambers. The process robot has a robot arm vertically moveable along a lift rail. Wafers are carried offset from the robot arm, to better avoid contamination. The automated system is compact and requires less clean room floor space.

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